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Atomic Layer Deposition of Electrocatalytic Insulator Al2O3 on Three-Dimensional Printed Nanocarbons

ACS NANO

NG, S.; IFFELSBERGER, C.; MICHALIČKA, J.; PUMERA, M., 2021: Atomic Layer Deposition of Electrocatalytic Insulator Al2O3 on Three-Dimensional Printed Nanocarbons. ACS NANO 15(1), p. 686 - 12, doi: 10.1021/acsnano.0c06961; FULL TEXT
(TITAN, ALD, KRATOS-XPS, VERIOS)

Equipment:

• High-resolution (scanning) Transmission Electron Microscope FEI Titan Themis 60-300 cubed
• Atomic layer deposition system Ultratech/CambridgeNanoTech Fiji 200
• X-ray Photoelectron Spectroscopy Axis Supra
• High resolution Scanning Electron Microscope FEI Verios 460L

Research Groups:

• CF: CEITEC Nano
• Future Energy and Innovation
• Advanced Low-Dimensional Nanomaterials

CEITEC authors:

• M.Sc. Siow Woon Ng, Ph.D.
• Jan Michalička
• Prof. Martin Pumera, Ph.D.
• Dr. Christian Iffelsberger